Multiresponse Optimization for a Novel Compliant Z-Stage by a Hybridization of Response Surface Method and Whale Optimization Algorithm

Table 5

Numerical results.

No.	M	N	P	K	F1	F2 (μm)
1	0.55	0.6	0.9	49	2.1846	423.89
2	0.55	0.75	1.05	51	1.8968	392.88
3	0.55	0.9	1.2	53	1.8956	253.77
4	0.6	0.6	1.05	53	1.615	221.14
5	0.6	0.75	1.2	49	2.1052	401.83
6	0.6	0.9	0.9	51	1.944	370.74
7	0.65	0.6	1.2	51	1.6641	309.1
8	0.65	0.75	0.9	53	1.7837	211.66
9	0.65	0.9	1.05	49	2.2807	381.09