Velocity-Free Adaptation Compensation Control of MEMS with Prescribed Performance

<div>The tracking response of <svg height="9.39034pt" id="M310" style="vertical-align:-3.42943pt" version="1.1" viewbox="-0.0498162 -5.96091 7.65486 9.39034" width="7.65486pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M556 393C556 426 537 448 514 448C496 448 478 435 471 420C468 414 462 401 466 394C473 382 480 368 480 346C480 268 392 143 338 67H336C329 163 319 253 309 330S286 448 254 448C215 448 160 383 127 337L143 311C167 344 200 373 208 373S222 365 229 320C246 214 264 66 268 -20C219 -83 131 -171 17 -239L25 -261L137 -235C248 -110 273 -79 335 8C384 77 481 215 520 287C544 332 556 363 556 393Z"></path></g></svg> and <span class="nowrap"><svg height="12.1828pt" id="M311" style="vertical-align:-3.429461pt" version="1.1" viewbox="-0.0498162 -8.75334 7.65486 12.1828" width="7.65486pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,7.653,-.222)"><path d="M-161 571C-161 600 -183 623 -212 623C-238 623 -262 600 -262 571C-262 544 -238 520 -212 520C-183 520 -161 544 -161 571Z"></path></g><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M556 393C556 426 537 448 514 448C496 448 478 435 471 420C468 414 462 401 466 394C473 382 480 368 480 346C480 268 392 143 338 67H336C329 163 319 253 309 330S286 448 254 448C215 448 160 383 127 337L143 311C167 344 200 373 208 373S222 365 229 320C246 214 264 66 268 -20C219 -83 131 -171 17 -239L25 -261L137 -235C248 -110 273 -79 335 8C384 77 481 215 520 287C544 332 556 363 556 393Z"></path></g></svg>.</span></div>

Mathematical Problems in Engineering

fig6

Figure 6

Figure 6: Velocity-Free Adaptation Compensation Control of MEMS with Prescribed Performance 