Industry 4.0 and the Internet of Things (IoT) require lightweight and small devices with self-power capabilities, high sensitivity and resolution, fast response times, and low-cost fabrication. An alternative solution for this can be achieved through the use of micro/nano-electromechanical systems (MEMS/NEMS) devices. These devices have important advantages in their electromechanical performance in comparison with conventional sensors, as they have small electromechanical components that allow increased sensitivity and resolution and enable responses to different physical or chemical signals. These devices could be used in a wide range of potential applications, such as energy harvesters, magnetometers, microgrippers, mirrors, gas and mass sensors, accelerometers, gyroscopes, and microfluidic devices.

The design stage of MEMS/NEMS devices requires mathematical and numerical methods to predict their optimal performance for each application, which can include different operation conditions. These methods are essential for improving the performance of MEMS/NEMS devices, allowing the better selection of materials, geometrical configurations, transduction mechanisms, dimensions, boundary conditions, and packaging. However, more investigations into analytical and numerical models are required for the analysis of electromechanical behavior, damping, noise, sensitivity, resolution, fluid-solid interaction, fatigue, fracture, and reliability of MEMS/NEMS devices. Thus, analytical and numerical models can be used to optimize the performance of these devices.

This Special Issue invites contributions of original research and review articles about analytical or numerical models to determine the performance of novel MEMS/NEMS devices for applications such as Industry 4.0, IoT, wearable devices, energy harvesters, healthcare devices, microfluidic devices, and consumer electronics.

Potential topics include but are not limited to the following:

• Analytical and numerical models of the electromechanical behavior of MEMS/NEMS devices
• Analytical and numerical models for reliability analysis of MEMS/NEMS sensors
• Mathematical and numerical methods for damping analysis of MEMS/NEMS resonators
• Numerical models of fluid-solid interaction for microfluidic devices
• Analytical and numerical models for sensitivity analysis of MEMS/NEMS sensors
• Mathematical and numerical methods for operation analysis of micro- and nanogenerators