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Modelling and Simulation in Engineering
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Modelling and Simulation in Engineering
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2011
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Article
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Fig 2
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Research Article
Plasma and BIAS Modeling: Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC
Figure 2
(a) energy distribution and (b) angular distribution of the sputtered species at the target.
(a)
(b)