Plasma and BIAS Modeling: Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC

Figure 8

Target experiment with Ar-Density = 4⋅10³ mbar, (Ti,C)=(0.5,0.05).

(a)

(b)

(c)

(d)

(e)

(f)