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Modelling and Simulation in Engineering
Volume 2011, Article ID 931415, 13 pages
Research Article

Plasma and BIAS Modeling: Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC

1Department of Mathematics, Humboldt-University of Berlin, Unter den Linden 6, 10099 Berlin, Germany
2Department of Physics, Humboldt-University of Berlin, 10099 Berlin, Germany

Received 10 May 2011; Accepted 22 June 2011

Academic Editor: Zeki Ayag

Copyright © 2011 Jürgen Geiser and Sven Blankenburg. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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