Table of Contents Author Guidelines Submit a Manuscript
Modelling and Simulation in Engineering
Volume 2011, Article ID 931415, 13 pages
http://dx.doi.org/10.1155/2011/931415
Research Article

Plasma and BIAS Modeling: Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC

1Department of Mathematics, Humboldt-University of Berlin, Unter den Linden 6, 10099 Berlin, Germany
2Department of Physics, Humboldt-University of Berlin, 10099 Berlin, Germany

Received 10 May 2011; Accepted 22 June 2011

Academic Editor: Zeki Ayag

Copyright © 2011 Jürgen Geiser and Sven Blankenburg. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. D. J. Christie, “Target material pathways model for high power pulsed magnetron sputtering,” Journal of Vacuum Science and Technology A, vol. 23, no. 2, pp. 330–335, 2005. View at Publisher · View at Google Scholar
  2. S. Longo, M. Capitelli, and K. Hassouni, “The coupling of PIC/MCC models of discharge plasmas with vibrational and electronic kinetics,” Journal De Physique, vol. 7, no. 4, pp. 271–281, 1997. View at Google Scholar
  3. D. J. Christie, “Particle-in-cell with Monte Carlo collisions gun code simulations of a surface-conversion H- ion source,” Communications in Computational Physics, vol. 4, no. 3, pp. 659–674, 2008. View at Google Scholar
  4. J. Geiser and R. Roehle, “Modeling and simulation for physical vapor deposition: multiscale model,” Journal of Convergence Information Technology, Korea, Article ID 1-075033, 2008. View at Google Scholar
  5. P. Eklund, Multifunctional Nanostructured Ti-Si-C Thin Films, vol. 1087 of Linköping studies in science and technology, Dissertation, Linköping University, 2007.
  6. S. Mahieu, G. Buyle, D. Depla, S. Heirwegh, P. Ghekiere, and R. De Gryse, “Monte Carlo simulation of the transport of atoms in DC magnetron sputtering,” Nuclear Instruments and Methods in Physics Research B, vol. 243, no. 2, pp. 313–319, 2006. View at Publisher · View at Google Scholar
  7. J. Geiser and S. Blankenburg, Monte Carlo Simulations Concerning Elastic Scattering with Application to DC and High Power Pulsed Magnetron Sputtering for Ti3 Si C2, Humboldt University of Berlin, Department of Mathematics, Berlin, Germany, 2009.