Plasma and BIAS Modeling: Self-Consistent Electrostatic Particle-in-Cell with Low-Density Argon Plasma for TiC

Table 2

Characteristics: Mass and radius of the elements.

Element	Atomic mass [u]	Atomic radius [pm]
Ar	39.948	71
C	12.0107	67
Si	28.0855	110
Ti	47.867	150