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Modelling and Simulation in Engineering
Volume 2012, Article ID 614070, 11 pages
http://dx.doi.org/10.1155/2012/614070
Research Article

Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

School of Mechanical Engineering, University Sains Malaysia, Engineering Campus, Seberang Perai Selatan, Penang, 14300 Nibong Tebal, Malaysia

Received 26 July 2012; Accepted 11 November 2012

Academic Editor: Aiguo Song

Copyright © 2012 Muhammad Irsyad Abdul Mokti and Inzarulfaisham Abd Rahim. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [1 citation]

The following is the list of published articles that have cited the current article.

  • N Marsi, B Y Majlis, F Mohd-Yasin, A A Hamzah, and A Z Mohd Rus, “ProTEK PSB as Biotechnology Photosensitive Protection Mask on 3C-SiC-on-Si in MEMS Sensor,” IOP Conference Series: Materials Science and Engineering, vol. 160, pp. 012093, 2016. View at Publisher · View at Google Scholar