Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

<table>Capacitance output for 1.5 <i>μ</i>m, 3 <i>μ</i>m, and 5 <i>μ</i>m electrodes gap. </table>

Modelling and Simulation in Engineering

Figure 5: Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring 