Research Article
Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring
Table 3
Specific values used in the calculation for all analysis parameters.
| | Analysis parameter | (mm) | (mm) | (mm) | (mm) | (mm) | (mm) | (mm) |
| | Gap study | | | | | | | | | 1.5 μm | | | | | | | | | 3 μm | 8.1 | 2.1 | 8.2 | 0.1 | 8.1 | 2.1 | 1.1 | | 5 μm | | | | | | | |
| | Anchor length | | | | | | | | | 0.5 mm | 8.1 | 0.6 | | | | | | | 1 mm | 8.1 | 1.6 | 8.2 | 0.1 | 8.1 | 2.1 | 1.1 | | l.5 mm | 8.1 | 2.1 | | | | | |
| | Dielectric coverage | | | | | | | | | 33% | Air: 6.1 | Air: 2.1 | | | | | | | | SiO2: 8.1 | SiO2: 6.1 | | | | | | | 66% | Air: 4.1 | Air: 2.1 | 8.2 | 0.1 | 8.1 | 2.1 | 1.1 | | | SiO2: 8.1 | SiO2: 4.1 | | | | | | | 100% | Air: — | Air: — | | | | | | | | SiO2: 8.1 | SiO2: 2.1 | | | | | |
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