Modelling and Simulation in Engineering / 2012 / Article / Tab 4

Research Article

Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 4

Simulation results for different electrode gaps.

Gap, μm1.53.05.0
Nominal capacitance (at 0  ), pF117.281558.827235.4343
Capacitance at 1000  , pF61.357634.475022.8095
Sensitivity (0–1000  ), pF/ 0.05590.02440.0126
Maximum percentage difference, %5.004.493.88
Average percentage difference, %2.822.102.17

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