Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 4

Simulation results for different electrode gaps.

Gap, μm	1.5	3.0	5.0
Nominal capacitance (at 0 𝜇𝜀), pF	117.2815	58.8272	35.4343
Capacitance at 1000 𝜇𝜀, pF	61.3576	34.4750	22.8095
Sensitivity (0–1000 𝜇𝜀), pF/𝜇𝜀	0.0559	0.0244	0.0126
Maximum percentage difference, %	5.00	4.49	3.88
Average percentage difference, %	2.82	2.10	2.17