Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 6

Simulation results for different dielectric coverage.

Dielectric percentage, %	33	66	100
Nominal capacitance (at 0 𝜇𝜀), pF	185.3399	253.5873	321.5873
Capacitance at 1000 𝜇𝜀, pF	62.8281	62.8281	70.2733
Sensitivity (0–1000 𝜇𝜀), pF/𝜇𝜀	0.1225	0.1906	0.2513
Maximum percentage difference, %	10.22	13.04	15.98
Average percentage difference, %	4.84	8.90	11.84