Modelling and Simulation in Engineering / 2012 / Article / Tab 6

Research Article

Simulation Study of Sensitivity Performance of MEMS Capacitive Bending Strain Sensor for Spinal Fusion Monitoring

Table 6

Simulation results for different dielectric coverage.

Dielectric percentage, %3366100
Nominal capacitance (at 0  ), pF185.3399253.5873321.5873
Capacitance at 1000  , pF62.828162.828170.2733
Sensitivity (0–1000  ), pF/ 0.12250.19060.2513
Maximum percentage difference, %10.2213.0415.98
Average percentage difference, %4.848.9011.84

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