Analytic Model of Microcantilevers as Low Frequency Generator

Table 1

Materials and dimensions.

Parameters	Substrate	Piezoelectric material	Beam material 1	Beam material 2
Material	Silicon	Lead zirconate titanate (PZT-5H)	Aluminium	Aluminium
Length	75	10	35	49
Width	70	15	2	2
Height	5	4	1	1