Research Article

A Simulation Model for Machine Efficiency Improvement Using Reliability Centered Maintenance: Case Study of Semiconductor Factory

Table 4

FMEA worksheet for test machine components.

Mechanical part list (impact Lead defect)Potential of failure modeEffectSeverityOccurrenceDetectionRPN

1Vacuum padWearDropped unit849288
2Ejector filterBlockingDropped unit848256
3Picker cylinderErosionUnit misplacement849288
4Solenoid valveValve does not open/closeDropped unit648192
5Pitch ringWearUnit misplacement538120
6Pitch bearingWearUnit misplacement52440
7Timing beltDamageUnit misplacement739189
8Test trayDamageUnit misplacement61424
9Air tubingLeakageUnit misplacement31412
10Motor shaftCrack/fractureDropped unit63236
11Motor statorOpen/short circuitDropped unit52220
12InserterBreakageOverpress on Lead849288
13Lead pusherBreakageOverpress on Lead849288
14Test socketPogo pin stuckOverpress on Lead858320
15Loader bufferWearUnit misplacement31824
16Loader preciserMisalignmentUnit misplacement61848
17Unloader preciserMisalignmentUnit misplacement738168
18Unloader sortableWearUnit misplacement41832
19Linear guideWearUnit misplacement849288
20Ball screwCrack/fractureDropped unit3126