Coupling Modeling and Adaptive Control for Piezoelectric-Actuated Positioning Stage

Table 1

Parameter identification result of fractional-order model.

Frequency (/Hz)	Gain ()	Order ()
1	1.0463	0.0002
10	1.0497	-0.0085
20	1.0386	-0.0077
50	1.0481	-0.0098
100	1.0327	-0.0059
5/40/80	1.0172	-0.0023