Coupling Modeling and Adaptive Control for Piezoelectric-Actuated Positioning Stage

Table 2

The root mean square error of the Hammerstein model and the proposed coupling model.

Frequency (/Hz)	The root-mean-square error /(μm)
	The Hammerstein model	The proposed coupling model
1	0.4610	0.1787
10	0.4044	0.1174
20	0.3098	0.1106
50	0.3402	0.1482
100	0.2656	0.1932
5/40/80	0.1195	0.0682