Coupling Modeling and Adaptive Control for Piezoelectric-Actuated Positioning Stage

Table 4

The root mean square error of the adaptive compound control.

Frequency (/Hz)	1	5	10
The root-mean-square error /(μm)	0.0076	0.0254	0.056
Frequency (/Hz)	20	1/5/10	1/10/20
The root-mean-square error /(μm)	0.1153	0.0600	0.1787