Coupling Modeling and Adaptive Control for Piezoelectric-Actuated Positioning Stage

Table 5

The relative error of the adaptive compound control.

Frequency (/Hz)	1	5	10
The relative error	0.11%	0.36%	0.80%
Frequency (/Hz)	20	1/5/10	1/10/20
The relative error	1.63%	0.49%	1.46%