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Volume 2017 (2017), Article ID 3982503, 8 pages
Research Article

Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization

1State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
2School of Statistics and Mathematics, Central University of Finance and Economics, Beijing, China

Correspondence should be addressed to Lu Deng; moc.anis@125ulgned

Received 15 March 2017; Accepted 8 May 2017; Published 19 June 2017

Academic Editor: Yajing Shen

Copyright © 2017 Chao Zhou et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


In the motion of probing nanostructures, repeating position and movement is frequently happing and tolerance for position error is stringent. The consistency between the axis of manipulators and image is very significant since the visual servo is the most important tool in the automated manipulation. This paper proposed an automated axis alignment method for a nanomanipulator inside the SEM by recognizing the position of a closed-loop controlling the end-effector, which can characterize the relationship of these two axes, and then the rotation matrix can be calculated accordingly. The error of this method and its transfer function are also calculated to compare the iteration method and average method. The method in this paper can accelerate the process of axis alignment to avoid the electron beam induced deposition effect on the end tips. Experiment demonstration shows that it can achieve a 0.1-degree precision in 90 seconds.