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Volume 2017 (2017), Article ID 3982503, 8 pages
https://doi.org/10.1155/2017/3982503
Research Article
Automated Axis Alignment for a Nanomanipulator inside SEM and Its Error Optimization
1State Key Laboratory of Management and Control for Complex Systems, Institute of Automation, Chinese Academy of Sciences, Beijing, China
2School of Statistics and Mathematics, Central University of Finance and Economics, Beijing, China
Correspondence should be addressed to Lu Deng; moc.anis@125ulgned
Received 15 March 2017; Accepted 8 May 2017; Published 19 June 2017
Academic Editor: Yajing Shen
Copyright © 2017 Chao Zhou et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.