Study on the Effect of Oxygen Defects on the Electrical and Optical Properties of Thin Films

Table 1

Condition of SnO₂ thin films.

Sample	Power; W	O flow; sccm	Deposition temp.; °C	Deposition time; hr	Preoxygen time; hr	Thickness; (nm)	Grain size; (nm)
S1	100	40	350	1		10	23
S2	150	40	350	1		25	22
S3	200	40	350	1		40	27
S4	100	40	350	1	1	12	26
S5	150	40	350	1	1	30	27
S6	200	40	350	1	1	50	29