Research Article
Study on the Effect of Oxygen Defects on the Electrical and Optical Properties of Thin Films
| Sample | Resistivity (ohm cm) | Carrier density (cm−2) | Mobility (cm2/V-s) |
| S1 | 0.5984 × 104 | 8.785 × 1013 | 11.9 | S2 | 0.6651 × 104 | 1.266 × 1014 | 7.41 | S3 | 1.368 × 104 | 6.246 × 1013 | 7.31 | S4 | 0.2310 × 104 | 2.646 × 1014 | 10.2 | S5 | 0.2467 × 104 | 3.071 × 1014 | 8.24 | S6 | 0.1054 × 104 | 1.747 × 1015 | 3.39 |
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