Influence of Cu Content on the Microstructure and Mechanical Properties of Cr-Cu-N Coatings

Table 1

The deposition parameters and the thickness of the coatings.

Deposition parameters
Base pressure (Pa)	6.0 × 10^−3
Working pressure (Pa)	0.4
N2 gas flow (sccm)	20
Ar gas flow (sccm)	65~80
Substrate temperature (°C)	300
Substrate bias voltage (v)	−150
Deposition time (min)	120
Cr target power (w)	800	800	800	800	800	800
Cu target power (w)	0	30	60	90	120	150
Coating thickness (μm)	1.71	2.16	2.30	2.52	2.92	3.22