Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode

Figure 3

Schematic drawing of the designed OBD system with an optical microscope. One laser diode, 2 aperture, 3 polarization beam splitter, 4 quarter-wave plate, 5 quadrant photodetector (QPD), 6 dual-axis manual stage, 7 CCD camera, 8 tube lens, 9 LED illuminator, 10 beam splitter, 11 pellicle beam splitter, 12 objective lens, 13 three-axis manual stage, 14 single-axis piezoelectric scanner (Z-PS), 15 probe holder, 16 cantilever probe, 17 sample, 18 single-axis piezoelectric scanner (Y-PS), and 19 three-axis piezoelectric scanner (XYZ-PS).