Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode

Figure 9

The sidewall topography of a standard grating was imaged with TR mode. (a) The AFM image and a cross-sectional profile at the marked position. (b) 3D view by the TR mode of the sidewall. The surfaces marked as α, β, γ, and δ were the same surfaces as in Figure 8.

(a)

(b)