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2018
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Article
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Tab 1
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Research Article
Three-Dimensional Atomic Force Microscopy for Sidewall Imaging Using Torsional Resonance Mode
Table 1
Active scanners in different modes.
Axis
VR mode
TR mode
x
X scanner of XYZ-PS
X scanner of XYZ-PS
y
Y scanner of XYZ-PS
Y-PS
z
Z-PS
Z scanner of XYZ-PS