Research Article

Deposition and Properties of Amorphous TiBN/AlCrYN Multilayer Coatings with Various Modulation Periods

Figure 6

Typical surface and cross-sectional morphologies for the TiBN/AlCrYN multilayer coatings deposited with the rotation speeds of 0.5 rpm (a, c) and 2 rpm (b, d) after oxidation at 900°C.
(a)
(b)
(c)
(d)