Deposition and Properties of Amorphous TiBN/AlCrYN Multilayer Coatings with Various Modulation Periods

Figure 8

(a) Surface morphology, (b) enlarged view of (a), (c) cross-sectional morphology, and (d) the corresponding EDS line-scanning profiles along the red arrow shown in (c) of the TiBN/AlCrYN multilayer coating deposited with the rotation speeds of 0.5 rpm after oxidation at 1000°C.