Application of FIB-SEM Techniques for the Advanced Characterization of Earth and Planetary Materials
Table 1
FIB as an independent instrument or combined with other techniques.
Synergistic techniques
Features
Target materials
Conditions and suggestions
References
Stand-alone FIB-SEM
Cross-section imaging or 3D tomography integrated with multiple detectors
Clay minerals and oil shales (this study)
(1) Medium current to balance milling speed and minimized curtain effect (2) Pt coated for protective layer (3) Acquire high-resolution SE and BSE image simultaneously for later image segmentation
U-Th-Pb isotope systems & trace element compositions in zircon, monazite etc.
(1) Pt/Au-coated as protective layer—evaporation field of carbon is too high (2) Make a mark for selected position if the area of interest is relatively small
(1) None carbon capping. Ideally no EXPOXY embedding (2) Low current for final milling and low KV E-beam imaging to minimize damage (3) Ensure STXM is performed prior to TEM on organic materials due to alteration of organic by high energy TEM beam