Recent Advances on SEM-Based In Situ Multiphysical Characterization of Nanomaterials

Figure 3

MEMS-based in situ mechanical tensile characterization of nanomaterials in SEM. (a) In situ tensile loading of a templated carbon nanotube (T-CNT). (b) In situ MEMS tensile tester for mechanical characterization of multiwalled nanotubes (MCNTs). (c) FE-SEM micrograph of a carbon nanowire with initial deflection. (d) Two types of nanotensile stages: top picture shows stage with capacitive sensor and bottom one with a clamped-clamped beam force sensor. (e) Microfabricated tensile test structure consisting of electrically isolated moving and fixed stages.

(a)

(b)

(c)

(d)

(e)