Recent Advances on SEM-Based In Situ Multiphysical Characterization of Nanomaterials

Table 2

MEMS-based mechanical characterization of micro- and nanomaterials.

Testing types	Materials	End-effectors	References
Tensile	2D thin films and beams
	Pt films	Thermal actuator	[75]
	Freestanding Al films	Electrostatic actuator	[62, 64]
		Bent-beam thermal actuators	[65]
	Freestanding PolySi film	Thermal actuator	[59]
	Nanocrystalline Ni nanobeam	Thermal actuator	[58]
	CNTs
	MCNTs	Thermal actuator	[59, 69]
		Electrostatic actuator	[63, 70]
	T-CNT	Thermal expansion beams	[68]
	1D nanowires
	Ni nanowires	Nanoindenter head	[66]
	Carbon nanowires	Electrostatic actuator	[67]
	Co nanowires	Electrostatic actuator	[71]
	Si nanowires	Electrostatic actuator	[72]
	ZnO nanowires	Electrostatic actuator	[73]
	GaN nanowires	Thermal actuator	[74]
Bending	Polyacrylonitrile nanofibers	Folded-beam loadcell	[76]
	Microcantilever aluminum beam	Comb-drive probe	[62]
	Thin-film polysilicon microstructures	Rotary comb-drive actuator	[77]