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Shock and Vibration
Volume 20, Issue 6, Pages 1113-1124
http://dx.doi.org/10.3233/SAV-130826

Parametric Excitation in a Two Degree of Freedom MEMS System

Johannes Welte,1 Till Jochen Kniffka,2 and Horst Ecker2

1Institute for Transport Studies, University of Natural Resources and Life Sciences, Vienna, Austria
2Institute of Mechanics and Mechatronics, Vienna University of Technology, Vienna, Austria

Received 11 October 2013; Accepted 11 October 2013

Copyright © 2013 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

This contribution investigates the influence of parametric excitation on the dynamic stability of a microelectromechanical system. In systems with just a single degree of freedom, parametric excitation causes the oscillator to exhibit unstable behavior within certain intervals of the parametric excitation frequency. In multi-degree of freedom systems on the other hand, unstable behavior is caused within a wider range of intervals of the parametric excitation frequency. Moreover, such systems show frequency intervals of enhanced stability, an effect known as anti-resonance phenomenon. Both types of phenomena, the parametric resonance and anti-resonance, are modeled and studied for a microelectromechanical system with two degrees of freedom and some novel results are discussed.