Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias
Figure 2
Frequency response of EA-MEMS-CR. AC frequency is near natural frequency. (a) Amplitude-frequency response and (b) phase-frequency response. is the dimensionless amplitude of the free end, dimensionless detuning frequency equation (13), and dimensionless phase equation (18). Zero value for corresponds to natural frequency. Two methods are used, namely, MMS and two-term (2T) ROM. In both figures (a) and (b) two cases are shown: (i) soft AC with zero DC bias (black lines: MMS ) and (ii) soft AC with nonzero DC bias (grey lines: MMS ; 2T-ROM ). The AC voltage, fringe, and damping are , , and , respectively.
