Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias

Figure 5

DC bias effect on the frequency response. AC frequency is near natural frequency. (a) Amplitude-frequency response, (b) phase-frequency response, and (c) Zone F detail. MMS is used. Three cases of DC bias are shown in all figures: (i) black lines: 𝛿_0𝐷=0.0003, (ii) dark grey lines: 𝛿_0𝐷=0.0007, and (iii) light grey lines: 𝛿_0𝐷=0.001. The AC voltage, fringe, and damping are 𝛿_0𝐴=0.1, 𝑓=0.26, and 𝑐=0.01, respectively.

(a)

(b)

(c)