Vibration Characteristics of Piezoelectric Microbeams Based on the Modified Couple Stress Theory

Table 1

Material properties of piezoelectric microbeam constituents [39].

𝐸11=𝜆+2𝜇; (GPa)	𝜈	𝐸55=𝜇; (GPa)	𝐸13=𝜆; (GPa)	𝑒1; (C/m^2)	𝑒5; (C/m^2)	𝜆33; (F/m)
207	0.349	44.6	106.1	−0.51	−0.45	−7.88×10^−11