Research Article

Natural Frequencies and Mode Shapes of Mechanically Coupled Microbeam Resonators with an Application to Micromechanical Filters

Figure 11

Tenth mode shape of the filter: (a) input, (b) output, (c) coupling beams, and (d) combination of (a), (b), and (c).
939467.fig.0011a
(a)
939467.fig.0011b
(b)
939467.fig.0011c
(c)
939467.fig.0011d
(d)