Natural Frequencies and Mode Shapes of Mechanically Coupled Microbeam Resonators with an Application to Micromechanical Filters

<table>Variation of the quality factor of the unactuated filter with the attachment location.</table>

Shock and Vibration

Figure 15: Natural Frequencies and Mode Shapes of Mechanically Coupled Microbeam Resonators with an Application to Micromechanical Filters 