Natural Frequencies and Mode Shapes of Mechanically Coupled Microbeam Resonators with an Application to Micromechanical Filters

Table 1

Filter specifications [9].

Parameter	Design value
Primary resonator length, 𝐿 (μm)	40.8
Primary resonator width, 𝑏 (μm)	8.0
Coupling location, 𝐿𝑖and𝐿𝑜 (μm)	4.08
Coupling beam length, 𝐿𝑐 (μm)	20.35
Coupling beam width, 𝑏𝑐 (μm)	0.75
Structural thickness, ℎ (μm)	1.9
Young's modulus, 𝐸 (GPa)	150
Polysilicon density, 𝜌 (kg/m^3)	2,300