Natural Frequencies and Mode Shapes of Mechanically Coupled Microbeam Resonators with an Application to Micromechanical Filters

Table 2

Natural frequencies (in MHz) for a filter and a single resonator identical to the resonators of the filter.

Filter				Single resonator
Mode shape number	Natural frequency			Mode shape number	Natural frequency
	Analytical	ANSYS	Difference (%)
1	9.471	9.460	0.116	1	9.475
2	9.479	9.469	0.105
3	26.015	25.909	0.407	2	26.118
4	26.099	25.991	0.414
5	37.787	37.622	0.437	—	—
6	51.017	50.570	0.876	3	51.202
7	51.385	50.930	0.885
8	83.574	82.345	1.470	4	84.639
9	84.453	83.176	1.512
10	104.463	102.740	1.649	—	—