Active Vibration Suppression of a 3-DOF Flexible Parallel Manipulator Using Efficient Modal Control

Table 1

Parameters of PPM and PZT transducers.

Symbol	Terms	Values
	Mass of moving platform	0.25 kg
	Length of the link	200 mm
	Mass of the link	0.011 kg
	Mass of the sliders	0.15 kg
	Angle of linear guide	120°, 240°, 0°
	PZT Young’s modulus	6.6 × 10^10 N/m^2
	PZT piezoelectric constant	−180 × 10^−12 C/N
	Beam thickness	2 mm
	PZT transducers thickness	0.2 mm