Failure Diagnosis System for a Ball-Screw by Using Vibration Signals

Table 1

Specifications of ball-screw-driven stage.

Components	Specifications	Value	Model (maker)
Stage	Repeatability	±0.02 mm	LP200-SC-600L-70-H-S (LPK)
	Stroke	600 mm
Motor	Rated rotating speed	3000 rpm	HF-KP73 (Mitsubishi)
	Input source	3 phases (60 Hz)
Ball-screw	Lead	20 mm	HTR 2020A (ISSOKU)
	Circuit	1.5 turns
	Diameter of ball centers	21 mm
	Diameter of balls	3.969 mm
	Contact angle	45°