Analysis of Closure Characteristics of a MEMS Omnidirectional Inertial Switch under Shock Loads

Figure 12

Fabrication errors of the switch (a) width of the proof mass spring decreasing, (b) width of the radial electrode spring decreasing, (c) radial gap increasing, and (d) width of the crossbeam decreasing.

(a)

(b)

(c)

(d)