Analysis of Closure Characteristics of a MEMS Omnidirectional Inertial Switch under Shock Loads

<div>The curve of the stiffness versus the structural parameters: (a) the stiffness of mass-spring system and radial electrode under different spring width and (b) the stiffness of axial electrode under different crossbeam width and thickness.</div>

Shock and Vibration

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Figure 6

Figure 6: Analysis of Closure Characteristics of a MEMS Omnidirectional Inertial Switch under Shock Loads 