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Shock and Vibration
Volume 2015 (2015), Article ID 867171, 15 pages
http://dx.doi.org/10.1155/2015/867171
Research Article

Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China

Received 23 September 2014; Revised 8 January 2015; Accepted 3 February 2015

Academic Editor: Dumitru I. Caruntu

Copyright © 2015 Sha Zhang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Sha Zhang, Wen-Ming Zhang, Zhi-Ke Peng, and Guang Meng, “Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam,” Shock and Vibration, vol. 2015, Article ID 867171, 15 pages, 2015. doi:10.1155/2015/867171