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Shock and Vibration
/
2016
/
Article
/
Tab 1
/
Research Article
Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor
Table 1
Parameters of the micro film.
a
b
h
v
E
ρ
(mm)
(mm)
(
μ
m)
(C
2
⋅N
−1
⋅m
−2
)
(
μ
m)
(GPa)
(kg/m
3
)
2
1
5
8.85 × 10
−12
0.5
190
2330