Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor

Table 2

Natural frequency of the micro pressure sensor for various clearances (rad/s).

			(%)				(%)
m
Mode	28163.51	24990.48	11.27	Mode	207730.60	207324.24	0.196
Mode	129142.32	128487.67	0.507	Mode	283224.23	282926.33	0.105
m
Mode	49598.20	48671.80	1.868	Mode	211704.51	211489.39	0.102
Mode	135442.01	135105.52	0.248	Mode	286151.65	285992.53	0.056
m
Mode	58272.73	57813.02	0.789	Mode	213903.08	213728.30	0.082
Mode	138853.40	138661.11	0.138	Mode	287782.02	287689.29	0.032