Simulations and Experiments on the Vibrational Characteristics of Cylindrical Shell Resonator Actuated by Piezoelectric Electrodes with Different Thicknesses

Table 3

The simulation results of resonant frequencies and vibrational amplitudes under different thicknesses of piezoelectrodes.

Thickness (μm)	Resonant frequency (Hz)		Amplitude (nm)
0	2981.9	Relative change	Null
100	2984.3	0.08%	19.1
200	2986.2	0.14%	12.4
300	2988.2	0.21%	8.92
400	2990.3	0.28%	8.38
500	2992.3	0.35%	7.93
600	2994.1	0.41%	7.46
700	2995.8	0.47%	6.95
800	2997.3	0.52%	6.70