Simulations and Experiments on the Vibrational Characteristics of Cylindrical Shell Resonator Actuated by Piezoelectric Electrodes with Different Thicknesses

Table 4

The comparison of experimental results between before and after the piezoelectrodes were attached.

Thickness of piezoelectrodes (μm)	Resonant frequency (Hz)			Vibrational amplitude (nm)	factor
	Before	After	Relative change		Before	After	Reduction rate
200	2720	2724	0.14%	34.18	5713	5171	9.49%
400	2816	2823	0.24%	22.38	6051	5101	15.71%
600	3038	3047	0.29%	16.47	6879	5458	20.65%
800	3026	3037	0.36%	12.08	6968	5475	21.43%