Flexoelectric Effect on Vibration of Piezoelectric Microbeams Based on a Modified Couple Stress Theory

<div><svg height="9.49473pt" id="M186" style="vertical-align:-0.2063999pt" version="1.1" viewbox="-0.0498162 -9.28833 3.60972 9.49473" width="3.60972pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M238 681C243 705 239 712 230 712C217 712 156 682 75 674L70 648H105C148 648 153 641 144 598L39 110C18 11 35 -12 55 -12C90 -12 166 36 221 103L205 125C174 93 130 65 118 65C112 65 108 68 114 96L238 681Z" id="g113-109"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="269" vert-adv-y="269"></glyph.data></g></svg>-dependence of <svg height="14.8173pt" id="M187" style="vertical-align:-5.52897pt" version="1.1" viewbox="-0.0498162 -9.28833 69.2508 14.8173" width="69.2508pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M300 -147C201 -63 143 98 143 270S200 602 300 686L282 710C136 610 70 450 70 271V270C70 89 136 -72 282 -170L300 -147Z" id="g113-41"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="346" vert-adv-y="346"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,4.498,0)"><path d="M615 290C615 392 563 448 529 448C511 448 491 441 484 434L483 425C518 400 546 349 546 273C546 158 504 46 417 46C381 46 356 77 356 142C356 184 380 293 392 334L387 340L307 323C305 288 296 228 287 188C265 94 221 52 180 52C144 52 112 89 112 171C112 278 164 372 241 430L226 454C106 394 23 288 23 155C23 40 79 -12 139 -12C184 -12 245 32 285 85C292 31 322 -12 376 -12C423 -12 470 18 501 45C570 104 615 184 615 290Z" id="g113-246"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="638" vert-adv-y="638"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,12.467,3.132)"><path d="M620 667C620 684 593 710 552 710C515 710 459 687 409 634C360 582 334 506 320 433H247L215 400L220 388H310L259 80C224 -129 199 -161 185 -174C175 -183 160 -192 141 -192C123 -192 90 -181 75 -165C69 -158 64 -156 54 -164C39 -178 24 -195 24 -208C24 -231 61 -257 94 -257C124 -257 162 -243 209 -194C267 -134 303 -66 343 107C369 220 378 279 393 385L503 397L523 433H404C432 619 464 660 500 660C522 660 542 646 566 621C573 614 583 615 593 621C603 628 620 648 620 667Z" id="g50-103"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="644" vert-adv-y="644"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,21.753,0)"><path d="M535 230V280H52V230H535Z" id="g117-33"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="587" vert-adv-y="587"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,32.29,0)"><path d="M615 290C615 392 563 448 529 448C511 448 491 441 484 434L483 425C518 400 546 349 546 273C546 158 504 46 417 46C381 46 356 77 356 142C356 184 380 293 392 334L387 340L307 323C305 288 296 228 287 188C265 94 221 52 180 52C144 52 112 89 112 171C112 278 164 372 241 430L226 454C106 394 23 288 23 155C23 40 79 -12 139 -12C184 -12 245 32 285 85C292 31 322 -12 376 -12C423 -12 470 18 501 45C570 104 615 184 615 290Z" id="g113-246"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="638" vert-adv-y="638"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,40.258,3.132)"><path d="M573 302C573 402 527 451 414 451C386 451 343 446 313 437L330 513L320 522C295 508 261 484 243 463L230 415C194 400 159 383 126 359L131 330C159 344 187 357 222 368L109 -147C96 -204 80 -214 18 -223L13 -255L256 -244L259 -212L236 -210C184 -205 180 -195 191 -141L219 -1C240 -10 268 -12 284 -12C352 4 431 48 484 104C543 166 573 240 573 302ZM481 290C481 165 381 37 305 37C280 37 249 56 235 71L302 395C328 399 353 402 372 402C427 402 481 378 481 290Z" id="g50-113"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="597" vert-adv-y="597"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,46.21,0)"><path d="M275 270C275 450 212 609 64 710L45 686C145 604 203 442 203 270S147 -63 45 -147L64 -170C213 -68 275 89 275 270Z" id="g113-42"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="346" vert-adv-y="346"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,50.708,0)"><path d="M368 703H309L44 -163H104L368 703Z" id="g113-48"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="412" vert-adv-y="412"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,56.069,0)"><path d="M615 290C615 392 563 448 529 448C511 448 491 441 484 434L483 425C518 400 546 349 546 273C546 158 504 46 417 46C381 46 356 77 356 142C356 184 380 293 392 334L387 340L307 323C305 288 296 228 287 188C265 94 221 52 180 52C144 52 112 89 112 171C112 278 164 372 241 430L226 454C106 394 23 288 23 155C23 40 79 -12 139 -12C184 -12 245 32 285 85C292 31 322 -12 376 -12C423 -12 470 18 501 45C570 104 615 184 615 290Z" id="g113-246"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="638" vert-adv-y="638"></glyph.data></g><g transform="matrix(.0091,0,0,-0.0091,64.038,3.132)"><path d="M245 635C92 635 37 457 37 312C37 149 91 -12 244 -12C395 -12 449 166 449 312C449 469 395 635 245 635ZM243 598C332 598 358 454 358 312C358 173 334 26 245 26C158 26 128 174 128 313S152 598 243 598Z" id="g50-49"></path><glyph.data ascent="3443" descent="-2856" horiz-adv-x="487" vert-adv-y="487"></glyph.data></g></svg> obtained for PMBs where <svg height="9.49473pt" id="M188" style="vertical-align:-0.2063999pt" version="1.1" viewbox="-0.0498162 -9.28833 6.83278 9.49473" width="6.83278pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M499 88L487 113C459 86 422 65 413 65C403 65 403 74 409 98L461 318C487 426 460 448 431 448C408 448 383 441 352 424C305 398 223 344 157 257H155L243 674C249 702 249 712 240 712C227 712 170 680 87 673L82 648H117C155 648 162 644 150 590L23 -4L30 -12C55 -4 81 3 105 8C113 53 131 150 143 187C199 281 323 387 372 387C390 387 393 369 380 311L328 86C313 19 319 -12 347 -12C379 -12 442 24 499 88Z" id="g113-105"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="516" vert-adv-y="516"></glyph.data></g></svg> is fixed at 10 <i>μ</i>m and <svg height="11.439pt" id="M189" style="vertical-align:-2.15067pt" version="1.1" viewbox="-0.0498162 -9.28833 19.4248 11.439" width="19.4248pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M541 160L512 170C485 116 462 88 439 67C411 41 376 35 318 35C272 35 238 37 224 48C207 61 205 85 212 121L290 533C305 611 308 615 391 622L397 650H139L133 622C217 615 221 612 206 533L126 118C111 41 103 34 23 26L17 0H474C489 31 528 124 541 160Z" id="g113-77"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="553" vert-adv-y="553"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,7.185,0)"><path d="M368 703H309L44 -163H104L368 703Z" id="g113-48"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="412" vert-adv-y="412"></glyph.data></g><g transform="matrix(.013,0,0,-0.013,12.546,0)"><path d="M499 88L487 113C459 86 422 65 413 65C403 65 403 74 409 98L461 318C487 426 460 448 431 448C408 448 383 441 352 424C305 398 223 344 157 257H155L243 674C249 702 249 712 240 712C227 712 170 680 87 673L82 648H117C155 648 162 644 150 590L23 -4L30 -12C55 -4 81 3 105 8C113 53 131 150 143 187C199 281 323 387 372 387C390 387 393 369 380 311L328 86C313 19 319 -12 347 -12C379 -12 442 24 499 88Z" id="g113-105"></path><glyph.data ascent="3473" descent="-2876" horiz-adv-x="516" vert-adv-y="516"></glyph.data></g></svg> is equal to 20 and 40, respectively.</div>

Shock and Vibration

fig5

Figure 5

Figure 5: Flexoelectric Effect on Vibration of Piezoelectric Microbeams Based on a Modified Couple Stress Theory 