Flexoelectric Effect on Vibration of Piezoelectric Microbeams Based on a Modified Couple Stress Theory

Table 1

Material constants of the piezoelectric microbeam [8–11].

150 GPa

0.33

7.5 × 10^3 Kg/m^3

−4.35 C/m^2

10 μC/m

2300

is Young’s modulus, is Poisson’s ratio, is mass density, is piezoelectric constant, is flexoelectric constant, is relative dielectric constant, and the vacuum dielectric constant = 8.85 × 10⁻¹² F/m.